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RFID – based Wireless Sensor Network for Semiconductor Manufacturing Equipment to enable Predictive Maintenance

NOV
16
2021
16 . NOV 2021

Lecture Hall B2 Innovation Forum

10:30 -11 :00 h | Hall B2 .441

Subjects: Semiconductor production | Soldering and joining technology for PCBs

Speaker: Dr. Thomas Moldaschl (Silicon Austria Labs)

Type: Lecture

Speech: English

Part of the session: Halbleiter und Quantentechnologie

The goal of this work was to implement a wireless RFID-based Sensor Network in the UHF frequency region inside a semiconductor cleaning machine to supplement existing sensors in order to simplify usability and reduce costs. The sensors are chosen in a way to extract useful information about the status of the semiconductor production machine to invoke specific system maintenance, thereby reducing maintenance times and costs. The great challenges are to obtain passive UHF receiver tags and sensors that reliably have to be detected among hundreds of other sensors in an electromagnetically complex and chemically harsh environment using innovative packaging and novel integration technologies.

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Dr. Thomas Moldaschl

Dr. Thomas Moldaschl

Silicon Austria Labs

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Informations

Thomas Moldaschl title=
Dr. Thomas Moldaschl
Dr. Thomas Moldaschl
Senior Scientist
Christian Strahberger title=
Dr. Christian Strahberger
Dr. Christian Strahberger

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